Technical Parameters
| Adaptive power | AC220 V 50/60 HZ |
| Standard range of the flow meter | 100sccm/200sccm/200sccm/500sccm (Unless otherwise specified, it shall be calibrated with nitrogen. Ranges are selectable) |
| Operating temperature | 5~45 ℃ |
| Operating pressure difference | 0.1~ 0.5 MPa |
| Operating pressure | Flowmeter pressure 3MPa, system outlet pressure = <0.3MPa(other non-standard pressure, must be customised) |
| Precision | ±1.5% FS |
| Measuring range | -0.1~0.15 MPa (0.01 MPa/grid) |
| Needle valve | 316 stainless steel |
| Stop valve | 316 stainless steel needle valve |
| Size | 260*450*450 mm |